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Ker Lann cleanroom was inaugurated on 2001 for the microfabrication of microarrays and microfluidic devices. It consists in various equipments for thin film deposition, photolithography, etching and metrology. These equipments are together in the cleanroom in a controlled environment.
The cleanroom with an area of 80 m² and a cleanliness class of 10 000 with a rate of 50% d'hygrométrie and a temperature of 21°C is the ideal place for the realization of biochips and microfluidic devices. There are three rooms : a photolithography room, a chemistry room with an extractor hood for the chemistry and a chemical filter for the applications of résines and finally a large room for characterization. There are three main steps in producing components which require several equipments:
The platform provides technical support to users and training to present equipments following the needs of the science project.
L'ensemble de ces équipements sont regroupés dans la salle Blanche de Ker Lann