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Platform for development of cell chips
Ker Lann cleanroom was inaugurated on 2001 for the microfabrication of microarrays and microfluidic devices. It consists in various equipments for thin film deposition, photolithography, etching and metrology. These equipments are together in the cleanroom in a controlled environment.
The cleanroom with an area of 80 m² and a cleanliness class of 10 000 with a rate of 50% d'hygrométrie and a temperature of 21°C is the ideal place for the realization of biochips and microfluidic devices. There are three rooms : a photolithography room, a chemistry room with an extractor hood for the chemistry and a chemical filter for the applications of résines and finally a large room for characterization. There are three main steps in producing components which require several equipments:
- The thin film deposition by the methods of spin-coating, of dip-coating and of evaporation and sputtering (PVD).
- The spin-coater enables the deposition of thin organic layers by centrifugation and coating of organic solution.
- Un métaliseur filing of various metals (gold, titanium, chromium, aluminum, nickel, ...).
- A plasma cleaner to piece together PDMS devices and for surface treatment.
- The structuring of thin films by photolithography, wet and dry etching.
- Un aligneur with a capacity of 2" and 4" with sunlight at 365 and 405 nm. It allows the transfer of a pattern on photoresist résine by photolithography.
- Le bâti de gravure plasma RIE can burn photosensitive resins and polymer layers, as well as ensuring an etching of silicium.
- Metrology by profilometry and microscopy.
- They allow the measurement of deposited layers ply and the observation of components made.
The platform provides technical support to users and training to present equipments following the needs of the science project.
Contacts
Liste des équipements
- Tournette ou spin-coater
- Métaliseur Plassys ME300
- Plasma cleaner
- Aligneur (MA-6)
- Bâti de gravure plasma RIE
- Profilométre
- Microscope optique
Localisation
L'ensemble de ces équipements sont regroupés dans la salle Blanche de Ker Lann