Direct access to content
The platform for development of polymer components can achieve micro-sized and nanoscale circuits for applications in optoelectronics and/or microfluidic. It consists in several equipments for thin film deposition, photolithography, etching and metrology. These facilities are grouped in a cleanroom in a controlled environment. These tools are complementary of the technical platform for material characterization which is used in process and final analysis of achievements.
The cleanroom with an area of 50 m² and a cleanliness class of 100 000 with a 50% rate of d'hygrométrie and a temperature of 21°. It's the perfect place for the realization of telecom, optical and microfluidic components. The atmosphere of the cleanroom can be rid of all foreign contaminants which can interfere in the realization of components . Indeed, the various steps required to develop components need extremely clean environment. The equipments in the cleanroom allow the realization of components following the « top-down » technique. There are three main steps in producing components that require different equipments:
The platform provides technical support to users and training to present equipments following the needs of the science project.
L'ensemble de ces équipements sont regroupés dans la salle Blanche de Cachan située au rez-de-chaussée bas du bâtiment d'Alembert.